Composition control in conducting oxide thin films
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials
Reference6 articles.
1. Deposition of transparent heat-reflecting coatings of metal oxides using reactive planar magnetron sputtering of a metal and/or alloy
2. Preparation of Sn‐doped In2O3(ITO) films at low deposition temperatures by ion‐beam sputtering
3. Effect of O2pressure during deposition on properties of rf‐sputtered Sn‐doped In2O3films
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2. Characterization of Sn-doped In2O3Film on Roll-to-Roll Flexible Plastic Substrate Prepared by DC Magnetron Sputtering;Japanese Journal of Applied Physics;2003-01-15
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5. The properties of reactively-sputtered, stoichiometry-controlled and optimum-conductivity transparent indium oxide films as a function of their titanium, aluminium and zinc content; comparisons with the use of tin as a dopant;Thin Solid Films;1999-04
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