Laser chemical vapour deposition of TiN and TiC films-Reference-Cited by-同舟云学术

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Laser chemical vapour deposition of TiN and TiC films

Published:1995-02 Issue:1 Volume:257 Page:7-14
ISSN:0040-6090
Container-title:Thin Solid Films
language:en
Short-container-title:Thin Solid Films

Author:

Cao L.X.,Feng Z.C.,Liang Y.,Hou W.L.,Zhang B.C.,Wang Y.Q.,Li L.

Publisher

Elsevier BV

Subject

Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials

Reference10 articles.

1. Proc. 3rd. Int. Conf. on Chemical Vapor Deposition;Lydtin,1972

2. Formation of thin rods of pyrolytic carbon by heating with a focused carbon dioxide laser

3. CO2 laser induced CVD of TiN

Cited by 7 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Surface Topography and Deuterium Retention of Polycrystalline Tungsten and Nanocrystalline Tungsten Film Exposed to Deuterium Plasma;Fusion Science and Technology;2017-10-19

2. Chemical vapour deposition of coatings;Progress in Materials Science;2003

3. Laser chemical vapor deposition of TiC on tantalum;Journal of Materials Science;2002

4. Laser chemical vapour deposition: materials, modelling, and process control;International Materials Reviews;2001-06

5. Titanium carbide coatings deposited by reactive ion beam-assisted, electron beam–physical vapor deposition;Surface and Coatings Technology;2000-02

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