A quantitative model for the evolution from random orientation to a unique texture in PVD thin film growth
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials
Reference14 articles.
1. Experimental study of the growth evolution from random towards a (111) preferential orientation of PVD TiN coatings
2. Influence of apparatus geometry and deposition conditions on the structure and topography of thick sputtered coatings
3. Reactive-sputter-deposited TiN films on glass substrates
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