Ion and plasma beam assisted thin film deposition
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials
Reference26 articles.
1. Thin Film Processes;Harper,1978
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3. Proc. 1st Int. Conf. on Plasma Surface;Oechsner,1988
4. Generation of surface layers and microstructures with a low enery plasma beam source
5. Direct ion beam deposition for thin film formation
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