Influence of the substrate on the annealing behaviour of sputter-deposited NiCr films
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials
Reference8 articles.
1. Aging model of reactively deposited thin NiCr films
2. Segregation effects in thin films
3. Resistance, temperature coefficient of resistance and long-term stability of annealed thin NiCrSi films
4. Backscattering Spectrometry;Chu,1978
5. The oxidation of metals
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2. Investigation of NiCr Thin Film Resistors for InP-Based Monolithic Microwave Integrated Circuits (MMICs);Journal of The Electrochemical Society;2011
3. Ni–Cr thin film resistor fabrication for GaAs monolithic microwave integrated circuits;Thin Solid Films;2006-08
4. Stress, resistance, and phase transitions in NiCr(60 wt %) thin films;Journal of Applied Physics;2000-03
5. Electrical resistance and mechanical stress in NiCr/Cu/NiCr thin films;Journal of Applied Physics;1999-01-15
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