The properties of diamond-like carbon films prepared by r.f. discharges
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials
Reference13 articles.
1. Deposition of hard and insulating carbonaceous films on an r.f. target in a butane plasma
2. Optical properties of hydrogenated hard carbon thin films
3. Some trends in preparing film structures by ion beam methods
4. The growth kinetics and properties of hard and insulating carbonaceous films grown in an r.f. discharge
5. Spin resonance spectroscopy of amorphous carbon films
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1. Electrical transport properties of Ni-doped diamond-like carbon films at and above room temperature;Journal of Applied Physics;2019-10-21
2. Development of Highly Conductive and Corrosion-Resistant Cr-Diamond-like Carbon Films;Journal of the Korean Ceramic Society;2019-05-31
3. Development of hydrogenated amorphous carbon thin film with high electrical resistance for use in embedded sensors in abrasive environment;Journal of Intelligent Material Systems and Structures;2012-06-14
4. Investigation of radio frequency plasma for the growth of diamond like carbon films;Physics of Plasmas;2012-03
5. Relation between physical structure and electrical properties of diamond-like carbon thin films;Diamond and Related Materials;2005-01
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