Inhomogeneous indium tin oxide films prepared by sputtering with multiple targets
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials
Reference3 articles.
1. Deposition of conducting and transparent thin films of indium tin oxide by reactive ion plating
2. Preparation and properties of reactively co-sputtered transparent conducting films
3. Tin-doped In2O3 films deposited by r.f. sputtering
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