Author:
Morgan A.E.,Quackenbush T.R.,Lim S.C.P.
Subject
Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials
Cited by
1 articles.
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1. Material characterization of plasma-enhanced chemical vapor deposited titanium silicide;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;1986-05