The calculation and use of chemical vapor deposition phase diagrams with applications to the TiBClH system between 1200 and 800 K
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials
Reference27 articles.
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4. Chemical Vapor Deposition of Epitaxial Films of Yttrium Iron Garnet and Gallium-Substituted Yttrium Iron Garnet and a Thermodynamic Analysis
5. Proc. 4th Conf. on Chemical Vapor Deposition;Walsh,1973
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