Sputter deposition of thin tantalum layers and low temperature interactions between tantalum and SiO2 and tantalum and silicon

Author:

Gallais P.,Hantzpergue J.J.,Remy J.C.,Roptin D.

Publisher

Elsevier BV

Subject

Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials

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