Auger electron spectroscopy investigation of metallic fusible links in programmable read-only memories-Reference-Cited by-同舟云学术

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Auger electron spectroscopy investigation of metallic fusible links in programmable read-only memories

Published:1983-01 Issue:1-3 Volume:103 Page:355-374
ISSN:0040-6090
Container-title:Thin Solid Films
language:en
Short-container-title:Thin Solid Films

Author:

Morgan A.E,Quackenbush T.R,Lim S.C.P

Publisher

Elsevier BV

Subject

Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials

Reference22 articles.

1. Proc. 14th Annu. Reliability Physics Symp.;Kenney,1976

2. Proc. 14th Annu. Reliability Physics Symp.;Davidson,1976

3. Corrosion Resistance of Several Integrated-Circuit Metallization Systems

4. Application of Ti: W barrier metallization for integrated circuits

Cited by 1 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Auger-Elektronen-Mikroanalyse Grundlagen und Anwendungen;Angewandte Oberflächenanalyse mit SIMS Sekundär-Ionen-Massenspektrometrie AES Auger-Elektronen-Spektrometrie XPS Röntgen-Photoelektronen-Spektrometrie;1986

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