A novel technique for fabrication of metallic structures on polyimide by selective electroless copper plating using ion implantation
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials
Reference7 articles.
1. Proc. 7th International Conference on Sensors and Actuators;Allen,1993
2. Selective electroless copper plating on silicon seeded by copper ion implantation
3. Metal vapor vacuum arc ion implantation for seeding of electroless Cu plating
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