Application of plasma etching techniques to metal-oxide-semiconductor (MOS) processing-Reference-Cited by-同舟云学术

登录注册会员服务联系我们

Application of plasma etching techniques to metal-oxide-semiconductor (MOS) processing

Published:1980-01 Issue:1 Volume:65 Page:111-123
ISSN:0040-6090
Container-title:Thin Solid Films
language:en
Short-container-title:Thin Solid Films

Author:

Booth R.C.,Heslop C.J.

Publisher

Elsevier BV

Subject

Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials

Reference10 articles.

1. Pathways in device lithography

2. Etching Characteristics of Silicon and its Compounds by Gas Plasma

3. Fabrication of deep square wave structures with micron dimensions by reactive sputter etching

4. Int. Electron Devices Meeting;Komiya,1973

Cited by 10 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Metallization;Handbook of Semiconductor Interconnection Technology, Second Edition;2006-02-22

2. Fundamental aspect and behavior of saturated fluorocarbons in glow discharge in absence of potential source of hydrogen;Journal of Polymer Science Part A: Polymer Chemistry;1992-07

3. LiNbO3 - A Practical Optoelectronic Waveguide Technology?;Integrated and Guided-Wave Optics;1988

4. Subtractive Etching;Semiconductor Lithography;1988

5. Kinetics of formation and reactions of radicals in radio-frequency pulsed discharges in CCl4/NH3mixtures;Journal of Physics D: Applied Physics;1987-07-14

同舟云学术

1.学者识别学者识别

2.学术分析学术分析

3.人才评估人才评估

"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370

www.globalauthorid.com

TOP