Properties of thin In2O3 and SnO2 films prepared by corona spray pyrolysis, and a discussion of the spray pyrolysis process
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials
Reference13 articles.
1. Science and Technology of Surface Coating;Chapman,1974
2. Thin Film Processes;Vossen,1978
3. Deposition techniques for dielectric films on semiconductor devices
4. Corona spray pyrolysis: A new coating technique with an extremely enhanced deposition efficiency
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