The influence of surface topography and angle of adatom incidence on growth structure in sputtered chromium
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials
Reference22 articles.
1. Influence of apparatus geometry and deposition conditions on the structure and topography of thick sputtered coatings
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