Improved thin film Al2O3 capacitors-Reference-Cited by-同舟云学术

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Improved thin film Al2O3 capacitors

Published:1978-06 Issue:2 Volume:51 Page:185-188
ISSN:0040-6090
Container-title:Thin Solid Films
language:en
Short-container-title:Thin Solid Films

Author:

Rao M.K.,Jawalekar S.R.

Publisher

Elsevier BV

Subject

Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials

Reference10 articles.

1. Handbook of Thin Film Technology;Maissel,1970

2. Thin film Al2O3 capacitors

3. M. Tech. Dissertation;Ajit,1974

4. Thin Film Technology;Berry,1968

5. Tantalum Thin Films;Westwood,1975

Cited by 6 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Fabrication of precision integrated capacitors;Thin Solid Films;2017-07

2. Properties of aluminium oxide thin films deposited in high effective reactive pulsed magnetron sputtering process;Materials Science-Poland;2012-12

3. Electrical characterization of aluminium oxide–aluminium thin film composites by impedance spectroscopy;Microelectronics Reliability;2011-07

4. Influence of dioxygen on the junction properties of metallophthalocyanine based devices;Journal of Applied Physics;1983-05

5. Improved properties of TaNTa2O5NxAl capacitors;Thin Solid Films;1979-11

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