Author:
Zhang S.-L.,Wang J.-T.,Kaplan W.,Östling M.
Subject
Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials
Reference26 articles.
1. Proc. 5th European Conf. on Chemical Vapour Deposition;Wang,1985
2. Low Pressure CVD of Silicon Nitride
3. Proc. 7th European Conf. on Chemical Vapour Deposition;Wang,1989
Cited by
29 articles.
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