Author:
Takagi Toshinori,Yamada Isao,Sasaki Akio
Subject
Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials
Reference11 articles.
1. Proc. 2nd Int. Conf. on Ion Sources;Takagi,1972
2. Ionized‐cluster beam deposition
3. Contact and interconnect formation on compound semiconductor devices by ionized-cluster beam deposition
4. J. B. Theeten, R. Madar, A. Mircea-Roussel, A. Rocher and G. Laurence, J. Cryst. Growth, to be published.
5. Conf. on Ion Plating and Allied Techniques;Takagi,1977
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