Modelling of polyurethane polishing pad surface topography and fixed-point polished surface profile-Reference-Cited by-同舟云学术

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Modelling of polyurethane polishing pad surface topography and fixed-point polished surface profile

Published:2024-07 Issue: Volume:195 Page:109646
ISSN:0301-679X
Container-title:Tribology International
language:en
Short-container-title:Tribology International

Author:

Wang Zhao,Wang Zixuan,Liang Yingdong,Meng Fanwei,Cui Zhijie,Chen Tao,Yang Yue,Fan Cheng,Yu Tianbiao,Zhao Ji

Funder

Northeastern University

Xi'an Jiaotong-Liverpool University

Publisher

Elsevier BV

Reference37 articles.

1. Physically-based modeling of pad-asperity scale chemical-mechanical synergy in chemical mechanical polishing;Wang;Tribol Int,2019

2. The role of pad topography in chemical-mechanical polishing;Kim;IEEE Trans Semicond Manuf,2014

3. Nonlinear Compression Behavior of the Grooved Polishing Pad: A Model and Its Validation;He;ECS J Solid State Sci Technol,2017

4. Numerical simulation and experimental validation of fixed abrasive grinding pad topography;Liu;Int J Adv Manuf Technol,2016

5. WJ. Contact of nominally flat surfaces;Greenwood;Proc R Soc Lond A Math Phys Sci,1966

Cited by 4 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Influences of ultrasonic vibration directions, amplitudes, and frequencies on sapphire polishing studied by molecular dynamics;Precision Engineering;2024-09

2. Surface roughness and fracture cracks of Al2O3/TiO2 composite coating by wet chemical mechanical grinding with structured abrasives pad;Journal of Materials Research and Technology;2024-09

3. Material removal modes and processing mechanism in microultrasonic machining of ball ceramic tool;Ceramics International;2024-08

4. Effect of Secondary Foaming on the Structural Properties of Polyurethane Polishing Pad;Materials;2024-06-05

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