Experimental study of key factors on super smooth surface fabrication upon single crystal silicon based on mechanochemical synergy-Reference-Cited by-同舟云学术

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Experimental study of key factors on super smooth surface fabrication upon single crystal silicon based on mechanochemical synergy

Published:2025-01 Issue: Volume:201 Page:110199
ISSN:0301-679X
Container-title:Tribology International
language:en
Short-container-title:Tribology International

Author:

Shen Xiao,Weng Xiaoyu,Li Yancheng,Tian Ye,Peng Xing,Xiong Ying,Qiao Shuo,Shi Feng

Funder

Science and Technology Program of Hunan Province

Chinese Academy of Sciences

National Natural Science Foundation of China

China Postdoctoral Science Foundation

Publisher

Elsevier BV

Reference69 articles.

1. Fabrication and metrology of diffraction limited soft x-ray optics for the EUV microlithography;Dinger;Proc SPIE,2004

2. Nano scale lithography based on optical projection printing;Yao,2006

3. Development of optics for EUV lithography tools;Murakami;Proc SPIE,2007

4. Nikon EUVL development progress update;Miura;Proc SPIE,2007

5. Change in edge surface flatness of silicon wafer during polishing;Urara;J Jpn Soc Precis Eng,2014

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