Slipping domains in water-lubricated microsystems for improved load support

Author:

Savio Daniele,Falk Kerstin,Moseler Michael

Funder

John von Neumann Institute for Computing (NIC)

Ministry of Science, Research

Arts Baden-Württemberg

DFG ("Deutsche Forschungsgemeinschaft")

Publisher

Elsevier BV

Subject

Surfaces, Coatings and Films,Surfaces and Interfaces,Mechanical Engineering,Mechanics of Materials

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4. Vapor phase anti-stiction coatings for MEMS;Ashurst;IEEE Trans Device Mater Reliab,2003

5. Mémoire sur les lois du mouvement des fluides;Navier;Mémoires lAcadémie R. des Sci. lInstitut Fr,1823

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