Author:
Kim Seong Jin,Dean Robert,Jackson Robert L.,Flowers George T.
Subject
Surfaces, Coatings and Films,Surfaces and Interfaces,Mechanical Engineering,Mechanics of Materials
Reference20 articles.
1. Fabrication of micro sensors on a flexible substrate;Lee;Sensors and Actuators A,2008
2. MEMS-based micropump in drug delivery and biomedical applications;Nisar;Sensors and Actuators B,2008
3. Microwave switch using MEMS-technology;Poddar;Sensors and Actuators A,2008
4. Smart structure dynamics;Hurlebaus;Mechanical Systems and Signal Processing,2006
5. Bulk micromachining of silicon;Kovacs;Proceedings of the IEEE,1998
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