Frictional characteristics of an aerostatic linear bearing

Author:

Fujii Yusaku

Publisher

Elsevier BV

Subject

Surfaces, Coatings and Films,Surfaces and Interfaces,Mechanical Engineering,Mechanics of Materials

Reference12 articles.

1. A high-precision coordinate measuring system for super-smooth polishing;Negishi;Nanotechnology,1995

2. Applied measurements of multipurpose precise interferometer (AMOS-1);Hosoe;Nanotechnology,1993

3. Development of a unique high precision linear motor integrated air slide table, and its application to laser beam writers;Onda;Opt Rev,1999

4. Optimal preview repetitive control for air slide linear motor;Egami;Trans Soc Instrum Control Eng (Japan),1994

5. An active air bearing, ultra-precision control of the floating position and vibration;Watanabe;JSPE,1988

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