Research on the fretting wear behavior of silicon wafers before and after carbon ions implantation
Author:
Publisher
Elsevier BV
Subject
Surfaces, Coatings and Films,Surfaces and Interfaces,Mechanical Engineering,Mechanics of Materials
Reference13 articles.
1. Study on performances of micro-friction and its control in MEMS;Liu;Chinese Journal of Mechanical Engineering,2002
2. Research progress in surface modification and micro-tribological behaviour of single-crystal silicon;Sun;Tribology,2004
3. Investigations on the friction force anisotropy of the silicon lattice;Gatzen;Wear,2003
4. Micro/nano-tribological studies of polysilicon and SiC films for MEMS applications;Sundararajan;Wear,1998
5. Nuclear techniques and equipment for non-semi-conductor applications of ion implantation;Dearnaley;Instruments and Methods,1980
Cited by 5 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. The nanoscale strengthening mechanism of metal and non-metal ion implantation for the single-crystal Fe based on MD method;Tribology International;2024-10
2. A wear-resistant silicon nano-spherical AFM probe for robust nanotribological studies;Physical Chemistry Chemical Physics;2022
3. Fretting wear behaviour of double-glow plasma Cr–Nb coating on γ-TiAl alloy;Proceedings of the Institution of Mechanical Engineers, Part J: Journal of Engineering Tribology;2017-07-03
4. Characterization of the microstructure evolution and subsurface hardness of graded stainless steel produced by different mechanical or thermochemical surface treatments;Surface and Coatings Technology;2016-06
5. Nano-scratch, nanoindentation and fretting tests of 5–80nm ta-C films on Si(100);Wear;2013-04
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线,采集、加工和组织学术论文而形成的新型学术文献查询和分析系统,可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容,当前同舟云学术共收录了国内外主流学术期刊6万余种,收集的期刊论文及会议论文总量共计约1.5亿篇,并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询!咨询电话:010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3