Effects of grain size and protrusion height on the surface integrity generation in the nanogrinding of 6H-SiC
Author:
Publisher
Elsevier BV
Subject
Surfaces, Coatings and Films,Surfaces and Interfaces,Mechanical Engineering,Mechanics of Materials
Reference42 articles.
1. Silicon carbide high-power devices;Weitzel;IEEE Trans Electron. Devices,1996
2. New mold manufacturing techniques;Hall,2005
3. Advances and challenges in the development of power-generation systems at small scales;Walther;Prog Energy Combust Sci,2011
4. The current understanding on the diamond machining of silicon carbide;Goel;J Phys D: Appl Phys,2014
5. Smaller, faster, tougher;Ozpineci;IEEE Spectr,2011
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