1. A.M. Madni, L.A. Wan, Microelectromechanical systems (MEMS): An overview of current state-of-the-art 1998 IEEE Aerospace Conference Proceedings, pp. 421–427.
2. MEMS-micropumps: a review;Nguyen;J Fluids Eng-Trans Asme,2002
3. An overview of some key issues about micro/nano manufacturing;Yang;Int J Mater Struct Integr,2008
4. K. Ueura R. Slatter Development of the harmonic drive gear for space applications 8th European Space Mechanisms and Tribology Symposium 1999 Toulouse, France 259 264.
5. A. Raviola, A. De Martin, R. Guida, G. Jacazio, S. Mauro, M. Sorli, Harmonic drive gear failures in industrial robots applications: an overview 2021 PHM Society European Conference,.11-11.