Wafer-level direct bonding of optimized superconducting NbN for 3D chip integration
Author:
Publisher
Elsevier BV
Subject
Electrical and Electronic Engineering,Energy Engineering and Power Technology,Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Reference16 articles.
1. European roadmap on superconductive electronics–status and perspectives;Anders;Physica C,2010
2. Waveguide integrated superconducting single-photon detectors implemented as near-perfect absorbers of coherent radiation;Akhlaghi;Nat. Commun.,2015
3. Superconductor digital electronics: scalability and energy efficiency issues;Tolpygo;Low Temp. Phys.,2016
4. Metrology of Quantum Control and Measurement in Superconducting Qubits;Chen,2018
5. An ultra-sensitive and wideband magnetometer based on a superconducting quantum interference device;Storm;Appl. Phys. Lett.,2017
Cited by 10 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Mechanical modeling and analysis of direct wafer bonding technology considering the effect of impurity particles;Composite Structures;2024-11
2. Fine pitch Nb-Nb Direct Bonding for quantum applications;2024 IEEE 74th Electronic Components and Technology Conference (ECTC);2024-05-28
3. Room Temperature Plasma-Enhanced Niobium-Niobium Wafer Bonding for 3D Integration of Superconducting Interconnects for Quantum Processing;2023 IEEE 25th Electronics Packaging Technology Conference (EPTC);2023-12-05
4. Wafer-to-Wafer Bonding Fabrication Process-Induced Wafer Warpage;IEEE Transactions on Semiconductor Manufacturing;2023-08
5. 3D Integration for Modular Quantum Computer based on Diamond Spin Qubits;2023 IEEE International Interconnect Technology Conference (IITC) and IEEE Materials for Advanced Metallization Conference (MAM)(IITC/MAM);2023-05
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3