Design and test of HTS magnet for circular planar magnetron cathode-Reference-Cited by-同舟云学术

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Design and test of HTS magnet for circular planar magnetron cathode

Published:2017-11 Issue: Volume:542 Page:40-45
ISSN:0921-4534
Container-title:Physica C: Superconductivity and its Applications
language:en
Short-container-title:Physica C: Superconductivity and its Applications

Author:

Qiu Q.Q.,Qu F.,Wang T.L.,Jing L.W.,Zhang G.M.,Xiao L.Y.

Funder

National Natural Science Foundation of China

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Energy Engineering and Power Technology,Condensed Matter Physics,Electronic, Optical and Magnetic Materials

Reference10 articles.

1. Low resistivity indium tin oxide transparent conductive films. II Effect of sputtering voltage on electrical property of films;Ishibashi;J. Vac. Sci. Technol. A,1990

2. Performance of the magnetron sputtering apparatus equipped with 60 mmΦ superconducting bulk magnet;Mizutani;Supercond. Sci. Technol.,2003

3. Bottom coverage of Cu deposit for 200-nm-class circular vias with high aspect ratios investigated by magnetron sputtering activated using superconducting bulk magnet;Hazama;Jpn. J. Appl. Phys.,2004

4. Fabrication of Mo/Si multilayer mirrors for extreme ultraviolet lithography by means of superconducting bulk magnet magnetron sputtering;Mizutani;Phys. C,2008

5. Development of a magnetron sputtering system with an extraordinary strong magnetic field near the target;Ikuta;Vacuum,2009

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