Suppressing-accelerating effect of Nitrotetrazolium Blue chloride in boosting superconformal cobalt filling

Author:

Li Yaqiang,Ma Xiaochuan,Li Ruopeng,Zhang Jinqiu,Yang Peixia,Liu Anmin,Wang Bo,Broekmann Peter,An Maozhong

Funder

National Natural Science Foundation of China

Harbin Institute of Technology

State Key Laboratory of Urban Water Resource and Environment

Publisher

Elsevier BV

Subject

Electrochemistry,General Chemical Engineering,Analytical Chemistry

Reference46 articles.

1. L. Yaqiang, M. Xiaochuan, Z. Jinqiu, et al. Research Progress of Metal Interconnection Technology and Related Theory in Chip Fabrication [J]. Surface technology, 2021, 50 (7): 24-43, 164.

2. Influences of suppressing additive malachite green on superconformal cobalt filling and nucleation [J];Ma;Journal of Electrochemistry,2022

3. Potential of ruthenium and cobalt as next-generation semiconductor interconnects [J];Choi;Korean Journal of Metals and Materials,2018

4. Spin-dependent electron scattering in cobalt interconnects [J];Lanzillo;J. Phys. D Appl. Phys.,2019

5. Mechanism of Co liner as enhancement layer for Cu interconnect gap-fill [J];He;J. Electrochem. Soc.,2013

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