Computational fluid dynamics study of the atomic layer deposition process around cylindrical and planar configurations
Author:
Funder
Academy of Finland
China Scholarship Council
Publisher
Elsevier BV
Subject
Applied Mathematics,Industrial and Manufacturing Engineering,General Chemical Engineering,General Chemistry
Reference54 articles.
1. Lattice-Boltzmann method for complex flows;Aidun;Annu. Rev. Fluid Mech.,2010
2. Atmospheric pressure process for coating particles using atomic layer deposition;Beetstra;Chem. Vap. Depos.,2009
3. A numerical study of the steady forced convection heat transfer from an unconfined circular cylinder;Bharti;Heat Mass Transf.,2007
4. Unit steps of an ALD half-cycle;Blomberg;ECS Trans.,2013
5. Dimensionless groups;Catchpole;Ind. Eng. Chem.,1966
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