Alacant: Modeling of glow discharge sputtering systems
Author:
Publisher
Elsevier BV
Subject
General Physics and Astronomy,Hardware and Architecture
Reference10 articles.
1. Energy transfer processes in glow discharges
2. Glow Discharge Processes, Sputtering and Plasma Etching;Chapman,1980
3. Evolution towards thermalization, and diffusion, of sputtered particle fluxes: Spatial profiles
4. Energy distributions of particles striking the cathode in a glow discharge
5. The contribution of fast neutrals to cathode erosion in glow discharges
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2. Numerical modeling for a better understanding of gas discharge plasmas;High Temperature Material Processes (An International Quarterly of High-Technology Plasma Processes);2005
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4. Radial profile of energetic particles bombarding the substrate in a glow discharge;Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films;1999-03
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