The influence of the intermolecular surface forces on the static deflection and pull-in instability of the micro/nano cantilever gyroscopes

Author:

Mojahedi M.,Ahmadian M.T.,Firoozbakhsh K.

Publisher

Elsevier BV

Subject

Industrial and Manufacturing Engineering,Mechanical Engineering,Mechanics of Materials,Ceramics and Composites

Reference37 articles.

1. Younis MI. Modeling and simulation of microelectromechanical systems in multi-physics fields [PhD Thesis]. Blacksburg, Virginia: Virginia Polytechnic Institute and State University; 2004.

2. A novel method to predict the pull-in voltage in a closed form for micro-plates actuated by a distributed electrostatic force;Chao;J Micromech Microeng,2006

3. A new efficient approach for modeling and simulation of nano-switches under the combined effects of intermolecular surface forces and electrostatic actuation;Mojahedi;Int J Appl Mech,2009

4. MEMS vibratory gyroscopes: structural approaches to improve robustness;Acar,2008

5. Symmetrical and decoupled nickel microgyroscope on insulating substrate;Alper;Sensor Actuat A: Phys,2004

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