Author:
Mojahedi M.,Ahmadian M.T.,Firoozbakhsh K.
Subject
Industrial and Manufacturing Engineering,Mechanical Engineering,Mechanics of Materials,Ceramics and Composites
Reference37 articles.
1. Younis MI. Modeling and simulation of microelectromechanical systems in multi-physics fields [PhD Thesis]. Blacksburg, Virginia: Virginia Polytechnic Institute and State University; 2004.
2. A novel method to predict the pull-in voltage in a closed form for micro-plates actuated by a distributed electrostatic force;Chao;J Micromech Microeng,2006
3. A new efficient approach for modeling and simulation of nano-switches under the combined effects of intermolecular surface forces and electrostatic actuation;Mojahedi;Int J Appl Mech,2009
4. MEMS vibratory gyroscopes: structural approaches to improve robustness;Acar,2008
5. Symmetrical and decoupled nickel microgyroscope on insulating substrate;Alper;Sensor Actuat A: Phys,2004
Cited by
25 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献