Author:
McGrath John,Davis Chris,McGrath Jim
Subject
Industrial and Manufacturing Engineering,Metals and Alloys,Computer Science Applications,Modeling and Simulation,Ceramics and Composites
Reference11 articles.
1. Chemical processes in glass polishing;Cook;J. Non-Cryst. Sol.,1990
2. J.M. Steigerwald, S.P. Murarka, R.J. Gutmann, CMP Microelectron. Mater (1997) 48–49.
3. Optical Polishing Of Metals
4. Stress distribution in chemical mechanical polishing;Srinivasa-Murthy;Thin Solid Films,1997
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12 articles.
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