Surface compositional and chemical-state changes of SiC, Si3N4 and SiO2 by energetic hydrogens

Author:

Sasaki T.A.,Baba Y.

Publisher

Elsevier BV

Subject

Nuclear Energy and Engineering,General Materials Science,Nuclear and High Energy Physics

Reference19 articles.

1. Chemical Sputtering;Roth,1983

2. Sputtering process of a silicon carbide surface with energetic ions by means of an AES-SIMS-FDS combined system

3. Trapped states of deuterium implanted into graphite and the thermal desorption

4. Proc. 9th Int. Vacuum Congress and 5th Int. Conf. on Solid Surfaces Madrid;Fukuda,1983

Cited by 5 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

1. Irradiation effects and thermal annealing behavior in H2+-implanted 6H–SiC;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2000-05

2. STRUCTURE AND CRYSTAL CHEMISTRY OF Ti3SiC2;Journal of Physics and Chemistry of Solids;1998-09

3. EELS analysis of SiC crystals under hydrogen and helium dual-ion beam irradiation;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1998-05

4. New in-situ parallel-detection electron energy-loss spectroscopy of SiC crystals irradiated with hydrogen ions;Journal of Nuclear Materials;1991-03

5. Radiation damage in ceramic plasma-facing materials;Journal of Nuclear Materials;1988-07

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