Low-temperature deposition of TiB2 on copper and some properties data
Author:
Publisher
Elsevier BV
Subject
Nuclear Energy and Engineering,General Materials Science,Nuclear and High Energy Physics
Reference10 articles.
1. Plasma-sprayed coatings for fusion reactor applications
2. Surface characterization of TiB2 coated on a molybdenum substrate
3. Chemical vapor deposited borides of the form (Ti,Zr)B2 and (Ta,Ti)B2
4. The chemical vapor deposition of TiB2 from diborane
Cited by 12 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. Remote-plasma chemical vapor deposition of conformal ZrB2 films at low temperature: A promising diffusion barrier for ultralarge scale integrated electronics;Journal of Applied Physics;2002-03-15
2. Preferred orientation of TiB2 plates prepared by CVD of the TiCl4 + B2H6 system;Journal of Materials Science;1991-12
3. ZrB2 coated on copper plate by chemical vapour deposition, and its corrosion and oxidation stabilities;Thin Solid Films;1990-08
4. Preparation of TiB2films by photochemical vapor deposition using a D2lamp;Applied Physics Letters;1990-03-05
5. The Mechanical Properties of Cu/TiB2 Multilayer Structures;MRS Proceedings;1990
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