Demonstration of plutonium etching in a RF glow discharge
Author:
Publisher
Elsevier BV
Subject
Nuclear Energy and Engineering,General Materials Science,Nuclear and High Energy Physics
Reference17 articles.
1. Plasma-Surface Interaction and Processing of Materials;Auciello,1990
2. Plasma Etching and Reactive Ion Etching;Coburn,1982
3. Thin Film Processes;Vossen,1978
4. The Chemistry of Plutonium;Cleveland,1979
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