Optimizing the refrigerants in ultra-low temperature Semiconductor processing chiller with mixed Refrigerant
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Published:2024-09
Issue:
Volume:61
Page:104864
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ISSN:2214-157X
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Container-title:Case Studies in Thermal Engineering
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language:en
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Short-container-title:Case Studies in Thermal Engineering
Author:
Jung Hye-InORCID,
Son Chang-Hyo,
Lee Joon-HyukORCID
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