Light emission from a Si target during ion beam sputtering
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics
Reference20 articles.
1. Sputtering by Particle Bombardment III;Yu,1991
2. Light emission from sputtered atoms following ion bombardment of polycrystalline Al and Cu targets
3. Adsorption of gases studied by secondary ion emission mass spectrometry
4. Bombardment-induced photon emission from Al and Al2O3 targets
5. Line shape measurements of atoms sputtered from polycrystalline Cu, Zn, and Al by 300 keV Ar+ bombardment
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