Damage depth profiles determination by ellipsometry: a new numerical algorithm
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics
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1. Influence of Hf doping on interfacial layers of Ta2O5 stacks studied by ellipsometry;Applied Surface Science;2013-04
2. Spectroscopic ellipsometry of very thin tantalum pentoxide on Si;Applied Surface Science;2009-08
3. Spectroscopic Ellipsometry as a Tool for Damage Profiling in Very Shallow Implanted Silicon;Plasma Processes and Polymers;2006-02-17
4. Depth profile characterization of low-energy B+- and Ge+-ion-implanted Si;Applied Surface Science;2003-04
5. Investigation of the surface micro-roughness of fluoride films by spectroscopic ellipsometry;Thin Solid Films;2001-10
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