Molecular beam studies on the laser-enhanced reaction of chlorine with a copper surface at 1064 nm
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics
Reference19 articles.
1. Laser-induced gas-surface interactions
2. Chemical Processing with Lasers;Bauerle,1986
3. Laser-induced desorption and etching processes on chlorinated Cu and solid CuCl surfaces
4. Laser-induced molecular processes on surfaces
5. A time-of-flight study on the nanosecond laser induced etching of Cu with Cl2 at 308 nm
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1. An angle-resolved time-of-flight mass spectrometric study of pulsed laser ablated Ta2O5;Journal of Applied Physics;1998-06
2. Mechanism studies of Cu RIE for VLSI interconnections;Microelectronic Engineering;1997-11
3. Time-of-flight mass spectrometric study on UV laser ablation of silver chloride;Applied Surface Science;1997-10
4. Laser induced gas-surface reaction of Cl2 supersonic molecular beam with a nickel surface;Applied Surface Science;1997-01
5. Photochemistry of adsorbed biacetyl: desorption and photofragmentation;Journal of Photochemistry and Photobiology A: Chemistry;1996-12
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