Sputtering of Group-IIIa elements. Properties of the metal cluster formation mechanism
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics
Reference36 articles.
1. Sputtering by Particle Bombardment I;Sigmund,1981
2. Energieverteilungen bei der Festk�rperzerst�ubung durch Ionenbeschu�
3. II. The energy spectrum of ejected atoms during the high energy sputtering of gold
4. Sputtering by Particle Bombardment III;Hofer,1982
5. Mass spectrometry of neutral molecules sputtered from polycrystalline metals by Ar+-ions of 100?1000 eV
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4. Depth of origin of atoms sputtered from crystalline targets;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2001-06
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