Determination of the optical constants of metals and semiconductors by combining ellipsometry with electron spectroscopy microscopy and X-ray specular reflection analysis-Reference-Cited by-同舟云学术

Determination of the optical constants of metals and semiconductors by combining ellipsometry with electron spectroscopy microscopy and X-ray specular reflection analysis

Published:1988-07 Issue:2-3 Volume:200 Page:527-535
ISSN:0039-6028
Container-title:Surface Science
language:en
Short-container-title:Surface Science

Author:

Gergely G.,Bodó Z.,Croce P.

Publisher

Elsevier BV

Subject

Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics

Reference25 articles.

1. Ellipsometric and X-ray specular reflection studies on naturally grown overlayers on aluminium thin films

2. Spectral ellipsometric TEM and electron spectroscopic investigations on oxidized aluminium thin films

3. Roughness measurements by spectroscopic ellipsometry

4. The interaction of oxygen with aluminium: Mainly ellipsometric aspects

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