Influence of metallic catalyst and doping level on the metal assisted chemical etching of silicon
Author:
Publisher
Elsevier BV
Subject
Condensed Matter Physics,General Materials Science,Mechanics of Materials,Metals and Alloys,Mechanical Engineering
Reference18 articles.
1. Metal-assisted chemical etching of silicon in HF–H2O2
2. Fabrication of Single-Crystalline Silicon Nanowires by Scratching a Silicon Surface with Catalytic Metal Particles
3. Morphological Control of Single-Crystalline Silicon Nanowire Arrays near Room Temperature
4. Mechanism of nanowire formation in metal assisted chemical etching
5. Pore formation in silicon by wet etching using micrometre-sized metal particles as catalysts
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1. Self-Sustained Quasi-1D Silicon Nanostructures for Thermoelectric Applications;ACS Applied Electronic Materials;2023-10-23
2. Impacts of Wafer Doping Type on Structural and Optical Properties of Black Silicon Fabricated by Metal-Assisted Chemical Etching;Key Engineering Materials;2023-05-25
3. Doping density, not valency, influences catalytic metal-assisted plasma etching of silicon;Materials Horizons;2023
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