Author:
Dinges H.W.,Kempf B.,Burkhard H.,Göbel R.
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Surfaces and Interfaces,General Physics and Astronomy,General Chemistry
Cited by
7 articles.
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2. CH[sub 4]/H[sub 2] reactive ion etching induced damage of InP;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;2000
3. Low energy ion beam etching of CuInSe2 surfaces;Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films;1999-01
4. Ion beam smoothing of indium-containing III-V compound semiconductors;Applied Physics A: Materials Science & Processing;1998-06-01
5. Reactive ion beam etching of InSb and InAs with ultrasmooth surfaces;Semiconductor Science and Technology;1998-05-01