Atomic layer controlled deposition of SiO2 and Al2O3 using ABAB… binary reaction sequence chemistry-Reference-Cited by-同舟云学术

登录注册会员服务联系我们

Atomic layer controlled deposition of SiO2 and Al2O3 using ABAB… binary reaction sequence chemistry

Published:1994-12 Issue: Volume:82-83 Page:460-467
ISSN:0169-4332
Container-title:Applied Surface Science
language:en
Short-container-title:Applied Surface Science

Author:

George S.M.,Sneh O.,Dillon A.C.,Wise M.L.,Ott A.W.,Okada L.A.,Way J.D.

Publisher

Elsevier BV

Subject

Surfaces, Coatings and Films,Condensed Matter Physics,Surfaces and Interfaces,General Physics and Astronomy,General Chemistry

Reference47 articles.

1. Gigabit age microelectronics and their manufacture

2. Deep-submicron CMOS warms up to high-speed logic

3. Epitaxial metal oxide films, a leading candidate for 21st century thin film technology

4. Design of ion-implanted MOSFET's with very small physical dimensions

5. 256-Mb DRAM circuit technologies for file applications

Cited by 85 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Dielectric breakdown of oxide films in electronic devices;Nature Reviews Materials;2024-08-07

2. Influence of Thermal Annealing on Mechanical and Optical Property of SiO2 Film Produced by ALD;Materials;2024-01-19

3. Materials and Interfaces;75th Anniversary of the Transistor;2023-07-03

4. Capacitance, conductance, and dielectric characteristics of Al/TiO2/Si diode;Journal of Materials Science: Materials in Electronics;2021-04-30

5. Ultraviolet laser damage properties of single-layer SiO2 film grown by atomic layer deposition;Optical Materials Express;2020-07-27

同舟云学术

1.学者识别学者识别

2.学术分析学术分析

3.人才评估人才评估

"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370

www.globalauthorid.com

TOP