SiNx deposited by in-line PECVD for multi-crystalline silicon solar cells
Author:
Publisher
Elsevier BV
Subject
General Materials Science,Renewable Energy, Sustainability and the Environment
Reference8 articles.
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2. Deposition of silicon nitride to improve the conversion efficiency of multicrystalline silicon solar cells;Coates;Euro. PV Conf.,2000
3. AlGaN/GaN metal-oxide-semiconductor heterostructure field effect transistor;Kahn;IEEE Electron Dev. Lett.,2000
4. Low temperature surface passivation by PECVD;Leguijt;Solar Energy Mater. Solar Cells,1996
5. Nybergh, K., 1997. Modeling the growth of PECVD silicon nitride films for crystalline silicon solar cells using factorial design and response surface methodology. In: 26th PVSC.
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