Reactive ion etching (RIE) technique for application in crystalline silicon solar cells
Author:
Publisher
Elsevier BV
Subject
General Materials Science,Renewable Energy, Sustainability and the Environment
Reference11 articles.
1. Numerical modeling of textured silicon solar cells using PC-1D
2. Use of porous silicon antireflection coating in multicrystalline silicon solar cell processing
3. Si/SiO2 etching in high density SF6/CHF3/O2 plasma
4. Surface texturing of large area multicrystalline silicon solar cells using reactive ion etching method
5. The black silicon method: a universal method for determining the parameter setting of a fluorine-based reactive ion etcher in deep silicon trench etching with profile control
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