Effects of helium gas mixing on the production of active species in nitrogen plasma
Author:
Publisher
Elsevier BV
Subject
General Physics and Astronomy
Reference19 articles.
1. Nitriding of zirconium and aluminium by using ECR nitrogen plasmas
2. Spectroscopic optimization of abnormal glow conditions for plasma ion nitriding
3. Enhanced saturation of sputtered amorphous SiN film frameworks using He‐ and Ne‐Penning effects
4. Emission characteristics of mixed gas plasmas in low-pressure glow discharges
5. Enhancement of reactive species density in nitrogen plasma by mixture of helium and nitridation experiment for silicon
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