Low-temperature deposition of hydrogenated amorphous silicon (a-Si:H): Control of polyhydride incorporation and its effects on thin film properties
Author:
Publisher
Elsevier BV
Subject
General Engineering
Reference18 articles.
1. Defects in plasma-deposited a-Si: H
2. Hydrogen in amorphous semiconductors
3. Structural interpretation of the vibrational spectra ofa-Si: H alloys
4. Thermal equilibrium processes in doped amorphous silicon
5. Equilibrium between band tails and dangling bonds in a-Si:H
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