Plasma immersion ion implantation for tunnel oxide passivated contact in silicon solar cell
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Published:2024-05
Issue:
Volume:268
Page:112730
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ISSN:0927-0248
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Container-title:Solar Energy Materials and Solar Cells
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language:en
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Short-container-title:Solar Energy Materials and Solar Cells
Author:
Yamaguchi NoboruORCID,
Müller RalphORCID,
Reichel Christian,
Benick Jan,
Miyajima Shinsuke